Last updated: Tue Sep 21 13:13:03 PDT 1999

Project: ESI
Stage: Aperture Mask Wheel
ID #: KESA-002


Required setting accuracy :


Performance requirements and design goals
ComponentRequirements 1
Motors: Galil #50-1000-
Gearbox: Harmonic Drive #HDUC E-50-IU 50:1 ratio
Limits 2:--
Fiducials: Magnetic - Renishaw #RGM22S (epoxy mounted reference actuator)-
Encoders: Galil - BEI #MX213-25-1000 (4000 quadrature counts/rev)
               Renishaw - #RGH22D (5 um resolution)
-
Air Cylinders:--
Air Solenoids:--
Lock/Clamp/Brake:--
Interlocks:--
  1. Speed, temperature, accuracies, electrical power, pressurized air, lubricant, coolant, N2 purge, ...
  2. Primary (inner) and secondary (outer) limits. These can be magnetic, optical, or physical contact
NOTES:


Manufacturer's specifications and limitations
ComponentMaximum Operating Condition Safe Ops Condition Requirements
Motors: Galil #50-1000 3750 RPM , 1.45 Nm peak torque--
Gearbox: Harmonic Drive 6000 RPM147 Ncm rated operating torque-
Limits:---
Fiducials:---
Encoders:---
Air Cylinders:---
Air Solenoids:---
Lock/Clamp/Brake:---

Final Mechanical Assembly and Testing Results

Motor tuning parameters under different spacial orientations and environment
Parameter Neutral Gravity Uphill 1 Downhill Cold Cold Uphill
PID Filter:KP:66666
KI:.5.5.5.5.5
KD:120120120120120
Acceleration (pulses/sec^2):100001000010000100001000010000
Deceleration (pulses/sec^2):100001000010000100001000010000
Speed (pulses/sec):150001500015000150001500015000
Other:------
  1. Uphill defined as motor (or driven end of shaft) in lowest position



Motion Parameters

Rotary Stage (unconstrained)

Distance from "home" 1 Position Encoder Counts Physical Units Time to Reach
Position # 1 (1a) 0 - -
2 (1b) 24750 - -
3 (1c) 52110 - -
4 (2a) 96670 - -
5 (2b) 124030 - -
6 (2c) 151390 - -
7 (3a) 195640 - -
8 (3b) 223000 - -
9 (3c) 250360 - -
10 (4a) 294740 - -
11 (4b) 322100 - -
12 (4c) 349460 - -
13 (5a) 394030 - -
14 (5b) 421390 - -
15 (5c) 448750 - -
Unload Aper Mask #1 268800 - -
Unload Aper Mask #2 368000 - -
Unload Aper Mask #3 467100 - -
Unload Aper Mask #4 70600 - -
Unload Aper Mask #5 169800 - -
1 revolution CW 495750 - -
CCW 495750 - -

1. Home is at the magnetic actuator. This is mounted to the wheel by an aluminum fixture and is epoxied onto it. When this passes the Renishaw readhead the counts are reset to zero.


Resolution of Stage
EncoderCounts/InchCounts/MillimeterCounts/Degree
On Motor---
On Stage--1377



NOTES:

Mechanical Drawing(s) #

Electronic Drawing(s) # EL-3354/55

Sign conventions are such that a positive motion of the motor turns the motor in a CW direction as viewed from the drive shaft looking back into the motor, and will the drive the stage towards the forward limit.

This stage will be using the "continuous dual loop" servo scheme where servoing is performed using the auxiliary encoder as the target.